Mems Angular Positioning Stage with a Vernier Latch
نویسندگان
چکیده
Latching MEMS angular positioning stages have been constructed by deep reactive ion etching and undercut of bonded silicon-on-insulator. Rotation is powered by a primary linear drive acting on a tangential drive pin attached to a passive stage. The approach is extensible to other tilt axes using inserted components. The linear stage is driven by buckling electrothermal actuators. Latching is performed by a rack and tooth mechanism dtiven by shape bimorph actuators. A Vernier mechanism is used to increase precision beyond the limit of pattern transfer.
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